Based on 20 years of accumulated ceramic material design, sintering technology,
precision processing and bonding technology, we have mass-produced and supplied
CVD, PE-CVD, ALD, and AlN Heater used in high-temperature UV Curing or Asher process
equipment. We have responded to the increasing demand for AIN heaters by securing
the largest mass production facilityes in Korea in Anseong and Gangneung city.
* Functional parts attached to the chamber in the CVD ALD equipment
used in the Deposition process during the semiconductor process.
AIN Heater makes it possible to apply heat evenly to the Wafer.