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사업분야

Business Field

ESC (Electrostatic Chuck)

ESC는 반도체 Etching 공정장비인 Etcher 장비의 핵심 부품으로, 부품 국산화는 물론이고
장비 회사와의 공동 개발이 가능한 수준의 경험과 기술을 보유하고 있습니다.
MLC와 Hot Press를 활용한 원천 제조 기술을 보유하고 있음에 따라
다양한 고객의 Needs에 맞춰 ESC를 개발, 제작하여 공급하고 있습니다.

* 반도체 공정 중 식각(Etching) 공정에서 사용되는 Etcher 장비 내 Chamber에 부착되어
Wafer를 정전력으로 고정시켜주는 소모성 부품

세라믹 ESC 제품 소개영상
1. Multi-layer ceramic (MLC) ESC

  • MiCo Ceramics’  High performance ESC are produced based on optimized inline MLC process.

  • MLC ESC are key components used in many semiconductor equipment and processes.

  • ESC design such as electrode and coolant pattern offer a various functional performance.

  • MiCo Ceramics’  MLC ESC offer optimal wafer temperature control with built-in multilayer electrodes and multi-zone heaters.

Multi-Layer Ceramic ESC
Multi-Layer Ceramic ESC Image 1 Multi-Layer Ceramic ESC Image 2 Multi-Layer Ceramic ESC Image 3
2. High performance Hot-pressed (HP) ESC

  • MiCo Ceramics’  Hot-pressed ESC has high-end ceramic properties

  • High purity ESC has high dielectric strength and relative density

  • High dielectric constant ESC generates high chucking force

  • Heaters or multi-electrodes can be embedded into ceramic plate

  • MiCo Ceramics’  HP ESC shows high durability in high density plasma etching process

High Purity ESC High Purity ESC Image High Dielectric Constant ESC High Dielectric Constant ESC Image
3. Ceramic Material Properties for MiCo Ceramics’ ESC
Grade Feature Density
(g/cm3)		 Dielectric
constant		 Volume resistivity
(Ω·cm)		 Thermal conductivity
(W/(m*K))		 Vickers hardness
(HV)

MLA

Multi layer electrode

≥ 3.8

10

≥ 1E16

24

≥ 1350

HPA

High purity ceramic

≥ 3.95

10

≥ 1E16

33

≥ 1800

HDA

High dielectric constant

≥ 3.9

14

≥ 1E15

30

≥ 2000

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Line Up
Process Detail ESC Type Remark

Dry Etch

Oxide

Mono-polar

High Density Ceramic, Multi-layer Electrode

Bi-polar

High Density Ceramic, Embedded He Channel

Poly

Mono-polar

Multi-zone Heater, Embedded Heater

Bi-polar

Multi-zone Heater, Multi-layer Electrode

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