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사업분야

Business Field

Ceramic Consumable Parts

“Large Size and Various Ceramic Parts”

CVD, ALD, Etcher 등 반도체 장비의 챔버에서 사용하는 대부분의 세라믹 소재 부품을
개발, 제조할 수 있는 기술과 경험 및 양산 시설을 확보하고 있으며,
날로 변화되고 있는 고객의 Needs에 대응할 수 있도록 신소재 개발도 지속적으로 진행하고 있습니다.

Advanced Ceramic Material
Supreme Y2O3 Ceramic
Y2O3
Hitria™ (Pure Y2O3)
A-tria™ (95% Y2O3)

High Density

Improvement of Pore

Improvement of Pitting

Microstructure Control

Sintering Technical

Identical Material

New Y2O3
Supreme Yttria™ New Y2O3 Image Supreme Attria™
Supreme Y2O3 Ceramic Characteristics
Section Hitria™ Supreme Yttria™ A-Tria™ Supreme Attria™

Density

Avg.
4.97g/㎤

Avg.
5.02g/㎤

Avg.
4.83g/㎤

Avg.
4.88g/㎤

Hardness

Avg.
7.1Gpa

Avg.
7.9Gpa

Avg.
7.8Gpa

Avg.
8.4Gpa

Microstructure

X500 image 1 X3,000 image 1 X5,000 image 1 X500 image 2 X3,000 image 2 X5,000 image 3 X500 image 3 X3,000 image 3 X5,000 image 3 X500 image 4 X3,000 image 4 X5,000 image 4

Improve of pore

Improve of pore

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Al2O3, Y2O3, AlN Product 및 특성
Section Aluminum Oxide(Al2O3) Yttrium Oxide(Y2O3) Aluminum Nitride(AlN) Hicera™
Hitria™ A-tria™

Purity

99.7

99.9

95.0

94.0 (AI+N)

Advantage

High chemically and Thermal resistance

Superior mechanical strength and hardness

Cost down by mass production

Good mechanical properties

Excellent plasma resistance and low erosion rate

Powerful heat transfer and fast spread

High thermal shock resistance

Better particle performance and longer life time

Aluminum Oxide(Al2O3) image Yttrium Oxide(Y2O3) image Aluminum Nitride(AlN) HiceraTM image

Application

Fine Ceramic Ring, Tube & injector parts

Ceramic Lids, various gas injector & nozzle

Focus rings & guide-rings

Heater tubes and various tube parts

Shadow ring to guide wafer

Gas injector and nozzle Life-pins and screws

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Line Up
Material Application Image

Al2O3

Rings, Lids, Plates and Injector parts

Al2O3 image1 Al2O3 image2 Al2O3 image3

Y2O3

Rings, Lids, Showehead and Injectors parts

Y2O3 image1 Y2O3 image2 Y2O3 image3

AIN

Rings, Tubes, Plates and Nozzle parts

AIN image1 AIN image2 AIN image3

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